| 摘要 |
A manufacturing apparatus which manufactures a superconducting wire rod, includes first, second, and third chambers which are connected in series, an exhaust device which exhaust air from the first to third chambers, a carrier device which carries a substrate such that the substrate passes through the first to third chambers in this order, a first film formation device which forms a metal layer on the substrate in the first chamber, a first gas supply device which supplies oxidation gas to the second chamber to oxidize a surface of the metal layer, and a second film formation device which forms an oxide layer on the metal layer, the surface of which has been oxidized, in the third chamber. |
