| 摘要 |
<p>PURPOSE: A chemical solution bath device facilitates a continuous process and improves productivity by filling a large-capacity bath with a chemical solution having short replacement time by a lost amount. CONSTITUTION: A bath (10) accommodates a liquid (60) used in the field of semiconductor, physics, and chemistry. A volume control part (20) controls the volume of the bath. A sensor part (30) detects the height of the liquid. The sensor part includes an upper limit sensor (32) and a lower limit sensor (34), detecting the surface of the liquid. A control part (40) controls an injection part (50) injecting the liquid to the bath by the sensor part and the volume control part. [Reference numerals] (40) Control unit</p> |
