| 摘要 |
<p>The imprinting device (1A) for transferring a pattern with nano-level detail formed on a stamper (4) onto a target resin film (5) comprises: tightly adhering holding units (12A, 12B), which are first holding units for holding the target resin film (5); a vacuum adsorption unit (9), which is a second holding unit for holding the stamper (4); and a first pressing unit (2A) and a second pressing unit (2B) for pressing the resin film (5) and the stamper (4). For the first and second pressing units (2A, 2B), airtight spaces are partitioned off by the resin film (5) that is held by the tightly adhering holding units (12A, 12B) and respective pressure-adjusting units (3A, 3B) for adjusting the pressures of the partitioned airtight spaces of the first and second pressing units (2A, 2B) are provided. The resin film (5) held by the tightly adhering holding units (12A, 12B) can be deformed by a difference in pressure resulting from the pressure-adjusting units (3A, 3B) and is configured from a plastic material.</p> |
