Automatic lithium target regenerating apparatus and automatic lithium target regenerating method

摘要

An automatic lithium target regenerating apparatus, which is provided with a function of measuring a thickness of a lithium film of a lithium target, and is capable of automatically regenerating a consumed lithium target by moving a deposition source to the lithium target, and an automatic lithium target regenerating method are obtained. An automatic lithium target regenerating apparatus (106) is capable of automatically regenerating lithium of a lithium target. The automatic lithium target regenerating apparatus (106) is provided with a lithium deposition unit (1), which deposits lithium on the lithium target, and the lithium deposition unit (1) is capable of depositing lithium on the lithium target by moving to the lithium target side.