发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A method for fabricating a semiconductor device includes defining a curved active region by forming a plurality of trenches over a semiconductor substrate, forming an insulating layer to fill the plurality of trenches, and forming a pair of gate lines crossing the curved active region, so that it is possible to prevent leaning of an active region by forming a curved active region.
申请公布号 US2014021553(A1) 申请公布日期 2014.01.23
申请号 US201213717062 申请日期 2012.12.17
申请人 SK HYNIX INC. 发明人 LEE HYO-SEOK;YEOM SEUNG-JIN;LIM SUNG-WON
分类号 H01L27/088;H01L21/28 主分类号 H01L27/088
代理机构 代理人
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