发明名称 TRANSISTORS AND METHODS OF MANUFACTURING THE SAME
摘要 Transistors, and methods of manufacturing the transistors, include graphene and a material converted from graphene. The transistor may include a channel layer including graphene and a gate insulating layer including a material converted from graphene. The material converted from the graphene may be fluorinated graphene. The channel layer may include a patterned graphene region. The patterned graphene region may be defined by a region converted from graphene. A gate of the transistor may include graphene.
申请公布号 US2014021446(A1) 申请公布日期 2014.01.23
申请号 US201313792525 申请日期 2013.03.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE CHANG-SEUNG;KIM YONG-SUNG;LEE JOO-HO;JUNG YONG-SEOK
分类号 H01L29/16;H01L29/66;H01L29/78 主分类号 H01L29/16
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