发明名称 |
Group Management Apparatus, Substrate Processing System and Method of Managing Files of Substrate Processing Apparatus |
摘要 |
There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible. |
申请公布号 |
US2014025677(A1) |
申请公布日期 |
2014.01.23 |
申请号 |
US201313944663 |
申请日期 |
2013.07.17 |
申请人 |
HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
ASAI KAZUHIDE;UEDA OSAMU;IWAKURA HIROYUKI |
分类号 |
G06F17/30 |
主分类号 |
G06F17/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|