发明名称 PRODUCTION METHOD FOR SEALING LAYER-COATED SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR DEVICE
摘要 <p>This production method for a sealing layer-coated semiconductor element comprises: an arrangement step in which a semiconductor element is arranged on a support base; a sealing step in which the semiconductor element is embedded and sealed by means of the sealing layer of a sealing sheet comprising a peeling layer and a sealing layer that is layered under the peeling layer, is made from a thermosetting resin, and is not completely cured; and a heating step in which, after the sealing step, the sealing layer is heated and cured. The heating step comprises: a first heating step in which the sealing sheet is heated at a first temperature under normal pressure; a peeling step in which, after the first heating step, the peeling layer is peeled from the sealing layer; and a second heating step in which, after the peeling step, the sealing layer is heated at a second temperature that is higher than the first temperature.</p>
申请公布号 WO2014014008(A1) 申请公布日期 2014.01.23
申请号 WO2013JP69374 申请日期 2013.07.17
申请人 NITTO DENKO CORPORATION 发明人 MITANI, MUNEHISA;EBE, YUKI;OOYABU, YASUNARI;NORO, HIROSHI;KONO, HIROKI
分类号 H01L21/56;H01L33/54 主分类号 H01L21/56
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