| 摘要 |
PROBLEM TO BE SOLVED: To increase work efficiency by eliminating setup time while improving printing accuracy.SOLUTION: A transportation fixture 10 is capable of transporting a plurality of separate substrates B collected as one piece of substrate, and comprises: a fixture body 40 on which the plurality of separate substrates B are placed, and inside which a plurality of suction holes 54 are formed respectively in a placing position of the separate substrates B so as to correspond to the plurality of separate substrates B and connected to one vacuum chamber 41; and a decompression holding part 60 having a supply port 61 to which a vacuum pump P is connected supplying negative pressure to the vacuum chamber 41, and maintaining a decompressed state of the vacuum chamber 41 by closing a vacuum valve P disposed between the supply port 61 and the vacuum chamber 41. |
