发明名称 |
ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK MODULE |
摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of reliably removing residual charge accumulated in a substrate.SOLUTION: An electrostatic chuck C of the present invention has heating members 4 arranged on one side of a substrate 1, and electrodes 2 arranged on the other side of the substrate 1. The electrostatic chuck C further includes an insulating layer 5 provided to cover the heating members 4, electrodes 2, and substrate 1 except one or a plurality of portions on the surface of the substrate 1; and an electrically grounded conductive member 7 that is fixed to the surface of the substrate 1 not covered with the insulating layer 5. |
申请公布号 |
JP2014013800(A) |
申请公布日期 |
2014.01.23 |
申请号 |
JP20120149845 |
申请日期 |
2012.07.03 |
申请人 |
NISSIN ION EQUIPMENT CO LTD |
发明人 |
HIKAWA KAZUNORI;UJI NOBUHIRO |
分类号 |
H01L21/683;B23Q3/15;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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