| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device which suppresses an error in a measured result and enables measurement at various temperatures.SOLUTION: An inspection device in one embodiment includes: an inspection stage which has a fixing means and a plurality of openings and to which an object to be inspected is fixed by the fixing means; a current terminal which performs inspection in contact with the object to be inspected through the opening; and a voltage terminal which performs inspection in contact with the object to be inspected through the opening. |
