发明名称 SEALING LAYER-COATED SEMICONDUCTOR AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE
摘要 This production method for a sealing layer-coated semiconductor element comprises: an arrangement step in which a semiconductor element is arranged on a support base; a sealing step in which the semiconductor element is embedded and sealed by means of the sealing layer of a sealing sheet comprising a peeling layer and a sealing layer that is layered under the peeling layer, that is made from a thermosetting resin, and that is not completely cured; and a heating step in which, after the sealing step, the sealing layer is heated and cured. The heating step comprises a first heating step in which the sealing sheet is oriented toward the support base and heated at a first temperature while mechanical pressure is applied, and a second heating step in which, after the first heating step, the sealing sheet is heated at a second temperature that is higher than the first temperature.
申请公布号 WO2014014007(A1) 申请公布日期 2014.01.23
申请号 WO2013JP69373 申请日期 2013.07.17
申请人 NITTO DENKO CORPORATION 发明人 MITANI, MUNEHISA;EBE, YUKI;OOYABU, YASUNARI
分类号 H01L21/56;H01L33/54 主分类号 H01L21/56
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