| 摘要 |
<p>An optical beam scanning element is provided, having excellent optical beam scanning characteristics, being low cost and with which the dynamic curving of a mirror can be suppressed. The optical beam scanning element (10) comprises: a mirror (2); roughly rectangular piezoelectric elements (11a-11d); first supporting bodies (4b and 4d); second supporting bodies (4a and 4c); driving means (5a-5d); and a means for applying compensation voltage (9). The piezoelectric elements are bonded to the reverse side of the mirror (2). The mirror (2) is supported by the first supporting bodies and the second supporting bodies, enabling it to oscillate in two directions, the axes of the two directions being the X axis and the Y axis. The driving means enable the mirror (2) to oscillate in two directions on the X axis and the Y axis. The piezoelectric elements are arranged so that the rectangular shapes are oblique in relation to both the X axis and the Y axis. When the mirror (2) is oscillating, the means for applying compensation voltage (9) applies compensation voltage of almost the same frequency as the vibration frequency of the mirror (2) onto the piezoelectric elements, and causes a compensatory distortion to occur in the mirror (2), said compensatory distortion compensating for the distortion that occurs in the mirror (2) as a result of the oscillation.</p> |
