发明名称 Light source apparatus and method of controlling the same
摘要 <p>A light source apparatus (100) configured to emit first light and second light includes a wavelength reference device (6), a splitter 7), a first detector (81), a second detector (82), and a control means (8,201,202). The control means includes a correction means (8) configured to reduce from a detection signal detected by the first detector a portion included in the detected signal and related to an intensity of the second light incident on the first detector from the splitter, and configured to reduce from a detection signal detected by the second detector a portion included in the detected signal and related to an intensity of the first light incident on the second detector from the splitter. The control means controls a wavelength of the first light and a wavelength of the second light based on signals from the correction means.</p>
申请公布号 EP2688160(A2) 申请公布日期 2014.01.22
申请号 EP20130175670 申请日期 2013.07.09
申请人 CANON KABUSHIKI KAISHA 发明人 TEZUKA, TARO
分类号 H01S5/0687 主分类号 H01S5/0687
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