发明名称 NICKEL ALLOY SPUTTERING TARGET.
摘要 Provided are a nickel alloy sputtering target, and a nickel silicide film formed with such a target, enabling the formation of a thermally stable silicide (NiSi) film, scarcely causing the aggregation of films or excessive formation of silicides, having low generation of particles upon forming the sputtered film, having favorable uniformity and superior plastic workability to the target, and which is particularly effective for the manufacture of a gate electrode material (thin film). This nickel alloy sputtering target contains 22 to 46 wt% of platinum and 5 to 100 wtppm of one or more components selected from iridium, palladium, and ruthenium, and remainder is nickel and inevitable impurities.
申请公布号 EP2290122(B1) 申请公布日期 2014.01.22
申请号 EP20100741143 申请日期 2010.01.22
申请人 JX NIPPON MINING & METALS CORPORATION 发明人 YAMAKOSHI YASUHIRO
分类号 C23C10/02;C22B9/22;C22B23/06;C22C19/03;C22F1/10;C23C10/28;C23C14/34;C23C14/58;H01L21/28;H01L21/285 主分类号 C23C10/02
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