| 摘要 |
A 3D shape measurement apparatus for measuring a 3D shape of an object existing on a measurement area, comprising, a pattern projection unit for projecting a pattern having a periodicity onto the measurement area, and a capturing unit for capturing an image of the area where the pattern is projected, wherein the measurement area is specified by a reference plane, a projection area of the pattern projection unit, and a capturing area of the capturing unit, and the pattern projection unit projects the pattern to be focused on the reference plane. The apparatus further comprises a first calculation unit for calculating phase information of a pattern of the captured image, a second calculation unit for calculating defocus amounts of the pattern in the captured image, and a third calculation unit for calculating a 3D shape of the object based on the phase information and the defocus amounts. |
