发明名称 Semiconductor die with a through silicon via and corresponding manufacturing process
摘要 <p>A semiconductor die according to this invention comprises a via realised in a bulk material (2). The via has an inner metallic conductor (28) isolated by a dielectric layer (17, 20) from a surrounding conductive area (16). The bulk material (2) is chosen in a set of doped semiconductor materials containing n-type and p-type materials. The surrounding conductive area (16) is in contact with the bulk material (2) and the surrounding conductive area (16) is made from a material chosen in a set of doped semiconductor materials containing n-type and p-type materials, the surrounding conductive area material being from one type among the n-type and the p-type, and the bulk material being from the other type among said n-type and said p-type.</p>
申请公布号 EP2688092(A1) 申请公布日期 2014.01.22
申请号 EP20120305874 申请日期 2012.07.19
申请人 IPDIA 发明人 TENAILLEAU, JEAN-RENE;VOIRON, FREDERIC
分类号 H01L21/768;H01L23/48 主分类号 H01L21/768
代理机构 代理人
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