发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 [Problem] provided is a technique for quickly analyzing errors and managing the product of a semiconductor device without reducing the throughput of a post process. (Solution) Each identification information is allocated to materials (lead frame) used in a semiconductor device (QFP) manufacture and a transfer unit (rack, rot, stacker, etc) transferring the materials. The identification information of the transfer unit is connected to the identification information of the materials supplied to the corresponding transfer unit. When materials is output from the transfer unit set in the loader part of each manufacturing device, and the completely processed material is supplied to the transfer unit of the unloader of the device, the identification information of the transfer unit is combined with a connection (relation).
申请公布号 KR20140009039(A) 申请公布日期 2014.01.22
申请号 KR20130080694 申请日期 2013.07.10
申请人 RENESAS ELECTRONICS CORPORATION 发明人 SAKAI NOBUTAKA;OTAKE MAMORU;SAITO KOJI;TAKAHASHI TOMISHI
分类号 H01L23/00;H01L21/02 主分类号 H01L23/00
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