发明名称 HEATER UNIT AND HEAT TREATMENT APPARATUS
摘要 <p>A heat treatment apparatus (10) according to the present invention includes a heat treatment furnace (1), a heat source (21), a light transmitting member (3), and a gas distribution instrument (4). The heat treatment furnace (1) receives an object. The heat source (21) emits infrared rays. The light transmitting member (3) is arranged to face the heat source (21) and separates the heat source (21) from atmosphere. The light transmitting member (3) is made of materials to transmit at least part of infrared rays emitted from the heat source (21). The gas distribution instrument (4) distributes cooling gas in a space (300) which is formed between the heat source (21) and the light transmitting member (3). [Reference numerals] (43) Ventilator</p>
申请公布号 KR20140009017(A) 申请公布日期 2014.01.22
申请号 KR20130054347 申请日期 2013.05.14
申请人 KOYO THERMO SYSTEMS CO., LTD. 发明人 NAKANISHI SATORU;FUJITA TOSHITAKA;FUKUDA YOSHIHITO;TATSUMI TOMOHIKO
分类号 H05B3/00;H01L21/02 主分类号 H05B3/00
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