| 摘要 |
<p>The invention relates to a method for determining the height of a number of spatial positions on a sample, defining a height map of a surface of said sample comprising irradiating the surface of the sample with light comprising a spatial periodic pattern in a direction perpendicular to the optical axis and moving parallel to the pattern, scanning the surface in the direction of the optical axis for each position of the surface and detecting the light reflected by the sample by a detector during the scanning, wherein in any scanning position only a single image is taken, the scanning speed bears a predetermined relation to the phase of the periodic pattern and analysing the output signal of the detector including for each spatial position of the detector the determination of the amplitude of the signal detected during the scanning and determining the scanning location where the amplitude is maximal.</p> |
