发明名称 |
IMPROVED ULTRASONIC CLEANING FLUID, METHOD AND APPARATUS |
摘要 |
A cleaning fluid including dispersed gas avoids using ultrasonic energy to induce cavitation by subjecting a liquid containing dissolved gas to a pressure reduction in a bubble machine, to generate a gas/liquid dispersion. The cleaning fluid can be used to clean articles such as semiconductor wafers using a device that includes a holder and a vibrator for supplying ultrasonic or megasonic energy to the article. |
申请公布号 |
EP2519966(A4) |
申请公布日期 |
2014.01.22 |
申请号 |
EP20100840679 |
申请日期 |
2010.12.07 |
申请人 |
LAM RESEARCH AG |
发明人 |
HOLSTEYNS, FRANK LUDWIG;LIPPERT, ALEXANDER;WIRNSBERGER, THOMAS |
分类号 |
H01L21/302;B08B3/12 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|