| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein, concerning an MEMS or an MOEMS applied device, configured based, in its function, on electromechanical optical effects of MEMS or MOEMS elements, the microstructure, driven by electromagnetic force, has an inherent mechanical resonance characteristic attributed to its mass, shape and structure, and the mechanical resonance phenomenon is induced by a very small energy, hence, the motion of the structure deviates from the motion that ought to be controlled by the driving signals, and the position can not be exactly determined. SOLUTION: The method negates the mechanical resonance characteristic by driving the microstructure with the driving waves, to which weighting processing is applied by use of the inverse mechanical resonant frequency of mechanical resonant frequency of the micro surface structure, driven by electromagnetic force. It further dampens the residual resonance response in real time by driving the microstructure with the driving signals, into which the residual resonance response components, obtained by differentiating twice with respect to time the actual operating signals of the microstructure, changing every moment, is negatively fed back. COPYRIGHT: (C)2010,JPO&INPIT |
