Capacitive micro-switch comprising a charge drain made up of directed nanotubes on the bottom electrode and method for manufacturing same

摘要

The micro-switch has an upper metallic membrane (45) and a radio frequency signal line (42) separated by gas or empty thickness. An electrical insulating layer (44) is located on the signal line. A charge drain (43) is constituted of conductor nanotubes e.g. carbon nanotubes, oriented to a surface of the signal line. The drain is surrounded by the electrical insulating layer, where the layer is made of dielectric material. An independent claim is also included for a method for fabricating a micro-switch.