AUTOMATIC OPTICAL MEASUREMENT METHOD

摘要

In an automatic optical measurement method according to the invention, with a movable reflection plate 6 moved to place under an optical axis, light projected from a light projecting portion 3 a is received by a light receiving portion 3 b via the movable reflection plate 6, a stationary reflection plate 11 and the movable reflection plate 6, whereas with the movable reflection plate 6 moved away from the optical axis and a reference 8 set on a sample stage 10, light projected from the light projecting portion 3 a is received by the light receiving portion 3 b via the reference 8 whereby a ratio between the intensities of the received lights is determined. During a sample measurement, light projected from the light projecting portion 3 a with the movable reflection plate 6 moved to place under the optical axis is received by the light receiving portion 3 b via the movable reflection plate 6 , stationary reflection plate 11 and movable reflection plate 6 so that the intensity of light thus received and the above ratio are used for estimating an intensity of light to be measured with the reference, the estimated intensity of light being used for correcting an intensity of light received via a sample.