| 摘要 |
PURPOSE: A manufacturing method of a niobium oxide with a two-layered structure is provided to easily manufacture a niobium oxide with a two-layered structure which is composed of a nano porous layer and a blocking layer by anode oxidation. CONSTITUTION: A manufacturing method of a niobium oxide with a two-layered structure comprises the following steps. Electrolyte which includes hydrofluoric acid (HF) and phosphoric acid (H3PO4) is manufactured. The niobium oxide with a two-layered structure is formed on the niobium thin film by implementing the anode oxidation for the niobium (Nb) thin film under the constant current of 0.25-10 mA/cm 2 in the electrolyte. The anode oxidation is performed for 30 minutes to 3 hours. The concentration of the phosphoric acid inside the electrolyte is 0.05-1.5 mole. The temperature of anode oxidation is -5-30°C. |
