发明名称
摘要 PROBLEM TO BE SOLVED: To provide a method for safely, simply and easily introducing a fluorine-containing functional group onto a surface of a carbon-based film without using a solution and a toxic gas, and without conducting a complicated operation. SOLUTION: This surface-treating method includes irradiating the carbon-based film with ultraviolet light in the presence of a gas of a perfluoroazoalkane expressed by formula (1): R<SB>F</SB>N=NR<SB>F</SB>, wherein R<SB>F</SB>represents a perfluoroalkyl group, and chemically bonding the perfluoroalkyl group to the surface of the carbon-based film. Thereby, the carbon-based film can further possess a function of specific properties peculiar to a fluorine atom and a fluorine-atom-containing functional group. COPYRIGHT: (C)2011,JPO&amp;INPIT
申请公布号 JP5392764(B2) 申请公布日期 2014.01.22
申请号 JP20090202235 申请日期 2009.09.02
申请人 发明人
分类号 C23C16/56;C09K3/18 主分类号 C23C16/56
代理机构 代理人
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