OPTOELECTRIC HYBRID SUBSTRATE

摘要

The present invention is to provide a photoelectricity mixed substrate having excellent mounting and flexibility of an optical device. The photoelectricity mixed substrate comprises an electric circuit substrate (E) in which a pad (3) for mounting an optical device is formed on the surface of an insulating layer (1) and an optical waveguide (W) in which a first clad layer (6) is formed to touch the other surface of the insulating layer (1) of the electric circuit substrate (E), wherein a metal layer (M) having the yield stress or 0.2% proof stress of 170 MPa or greater and a thickness of 10-25 μm is installed in the part corresponding to the pad (3) for mounting the optical device between the insulating layer (1) and the first clad layer (6). [Reference numerals] (1) Insulating layer; (3) Pad for mounting an optical device; (6) First clad layer; (E) Electric circuit substrate; (M) Metal layer; (W) Optical waveguide