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发明名称
CRYOPUMP REGENERATION METHOD AND APPARATUS
摘要
<p>A cryopump is regenerated by means of an ejector pump (70) which draws gas from the cryopump as the pump is warmed. The ejector (70) is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation.</p>
申请公布号
WO1986005240(A1)
申请公布日期
1986.09.12
申请号
US1986000462
申请日期
1986.03.03
申请人
发明人
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主分类号
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