| 摘要 |
<p>An inspection system including a catadioptric objective that facilitates dark-field inspection is provided. The objective includes an outer element furthest from the specimen having an outer element partial reflective surface oriented toward the specimen, an inner element nearest the specimen having a center lens comprising an inner element partial reflective surface oriented away from the specimen, and a central element positioned between the outer lens and the inner lens. At least one of the outer element, inner element, and central element has an aspheric surface. The inner element is spatially configured to facilitate dark-field inspection of the specimen.</p> |
