| 发明名称 |
III-V NITRIDE SUBSTRATE BOULE AND METHOD OF MAKING AND USING THE SAME |
| 摘要 |
An (Al,Ga,ln)N boule comprising native (Al,Ga,ln)N seed material and (Al,Ga,ln)N material grown thereon, comprising an interlayer or at least one parting material layer contained within the boule. |
| 申请公布号 |
EP1264011(B1) |
申请公布日期 |
2014.01.22 |
| 申请号 |
EP20010920321 |
申请日期 |
2001.03.12 |
| 申请人 |
CREE, INC. |
发明人 |
VAUDO, ROBERT, P.;FLYNN, JEFFREY, S.;BRANDES, GEORGE, R.;REDWING, JOAN, M.;TISCHLER, MICHAEL, A. |
| 分类号 |
C30B23/00;C30B29/38;C30B25/00;C30B25/02;C30B25/18;C30B29/40;C30B33/00;H01L21/02;H01L21/20;H01L21/203;H01L21/205;H01L33/32 |
主分类号 |
C30B23/00 |
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