END EFFECTOR HAVING MULTIPLE-POSITION CONTACT POINTS

摘要

Provided in the present invention is a device for elevating a substrate. The device includes a first piece and a second piece. The device includes a first contact point set inside one flat surface and a second contact point set. One or more contact positions from each set exist on the first piece and the second piece. In addition, the device includes an actuator which moves the first piece in actually parallel with the flat surface at between a first position and a second position. Furthermore, the first position arranges the first contact point set such that all of the contact points in the first contact point set can be engaged with a substrate while the second position arranges the second contact point set such that all of the contact points in the second contact point set can be engaged with a substrate.