| 摘要 |
The present invention is to provide a cleaning method for cleansing a cup and a member around the cup. In the cleaning method, a cleaning solution is supplied from the upper part of a cleaning jig to a cleansing jig by holding the cleaning jig (80) in a substrate holding part (52) and rotating it. The cleansing solution supplied to the cleaning jig is spread along the surface of an inclined part formed around the total cleaning jig near the outer edge of the cleaning jig. Therefore, the cup is cleaned. |
