发明名称 Helium sensor
摘要 The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.
申请公布号 US8633704(B2) 申请公布日期 2014.01.21
申请号 US20090918948 申请日期 2009.02.25
申请人 GROSSE BLEY WERNER;WETZIG DANIEL;INFICON GMBH 发明人 GROSSE BLEY WERNER;WETZIG DANIEL
分类号 G01N27/62 主分类号 G01N27/62
代理机构 代理人
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