发明名称 |
Large area thin freestanding nitride layers and their use as circuit layers |
摘要 |
Thin flat crack-free freestanding nitride layers are fabricated by laser patterning of the interface and/or opposing surface of the nitride layer. The nitride layer is substantially flat once removed from the non-native substrate. The thin flat crack free nitride layers are between 3 and 250 microns thick and can have areas greater than 1 cm2. |
申请公布号 |
US8633493(B2) |
申请公布日期 |
2014.01.21 |
申请号 |
US20090462295 |
申请日期 |
2009.07.31 |
申请人 |
ZIMMERMAN SCOTT M.;BEESON KARL W.;LIVESAY WILLIAM R.;ROSS RICHARD L.;GOLDENEYE, INC. |
发明人 |
ZIMMERMAN SCOTT M.;BEESON KARL W.;LIVESAY WILLIAM R.;ROSS RICHARD L. |
分类号 |
H01L29/20 |
主分类号 |
H01L29/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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