发明名称 Piezoelectric resonator element, piezoelectric resonator, and acceleration sensor for reducing vibration sensitivity in at least one axis
摘要 A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.
申请公布号 US8633638(B2) 申请公布日期 2014.01.21
申请号 US201313784538 申请日期 2013.03.04
申请人 SEIKO EPSON CORPORATION 发明人 KIKUSHIMA MASAYUKI
分类号 H03H9/19;H03H9/215 主分类号 H03H9/19
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