发明名称 GENERATION DEVICE AND GENERATION METHOD FOR WIRING DATA, PROGRAM THEREFOR, AND DRAWING DEVICE
摘要 PROBLEM TO BE SOLVED: To generate wiring data while suppressing occurrence of a wiring omission and an increase in processing time.SOLUTION: A generation device for wiring data includes: an error acquisition part which acquires arrangement errors of a semiconductor chip with respect to a reference position and a reference attitude on a substrate; a region information acquisition part which acquires enclosing region information indicative of an enclosing region enclosing the semiconductor chip on the substrate and wider than the semiconductor chip; and a wiring data generation part which generates enclosing region wiring data indicative of an enclosing region wiring pattern of a part of a connection wiring pattern which corresponds to the enclosing region, on the basis of a reference fan-out wiring of a reference wiring pattern set for a reference chip with no arrangement error and free of a defective wiring. Then, the wiring data generation part generates the enclosing region wiring data so that the position and attitude of the reference fan-out wiring for the reference chip and the position and attitude of the fan-out wiring of the semiconductor chip for the semiconductor chip on the substrate are the same irrespective of arrangement errors.
申请公布号 JP2014011264(A) 申请公布日期 2014.01.20
申请号 JP20120145880 申请日期 2012.06.28
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KITAMURA KIYOSHI;NAKAI KAZUHIRO
分类号 H01L21/02;G03F7/20;H01L21/027;H01L23/12 主分类号 H01L21/02
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