发明名称 |
GENERATION DEVICE AND GENERATION METHOD FOR WIRING DATA, PROGRAM THEREFOR, AND DRAWING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To generate wiring data while suppressing occurrence of a wiring omission and an increase in processing time.SOLUTION: A generation device for wiring data includes: an error acquisition part which acquires arrangement errors of a semiconductor chip with respect to a reference position and a reference attitude on a substrate; a region information acquisition part which acquires enclosing region information indicative of an enclosing region enclosing the semiconductor chip on the substrate and wider than the semiconductor chip; and a wiring data generation part which generates enclosing region wiring data indicative of an enclosing region wiring pattern of a part of a connection wiring pattern which corresponds to the enclosing region, on the basis of a reference fan-out wiring of a reference wiring pattern set for a reference chip with no arrangement error and free of a defective wiring. Then, the wiring data generation part generates the enclosing region wiring data so that the position and attitude of the reference fan-out wiring for the reference chip and the position and attitude of the fan-out wiring of the semiconductor chip for the semiconductor chip on the substrate are the same irrespective of arrangement errors. |
申请公布号 |
JP2014011264(A) |
申请公布日期 |
2014.01.20 |
申请号 |
JP20120145880 |
申请日期 |
2012.06.28 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
KITAMURA KIYOSHI;NAKAI KAZUHIRO |
分类号 |
H01L21/02;G03F7/20;H01L21/027;H01L23/12 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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