发明名称 CHUCK TABLE MECHANISM OF CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a quick-release chuck table mechanism of a cutting device.SOLUTION: The chuck table mechanism 10 of a cutting device for holding a planar workpiece stuck to an annular frame of magnetic material via an adhesive tape comprises: a table 50 secured to the table base 6 of the cutting device and having a holding area 51 for holding the workpiece on the upper surface; and a frame mount 60 having a permanent magnet 64 secured to the table base and disposed in a region where the annular frame is located, and positioning means 65 for mounting the annular frame while aligning the center with that of the table. The frame mount is secured to the table base, and the table is detachable from the table base.
申请公布号 JP2014011422(A) 申请公布日期 2014.01.20
申请号 JP20120149267 申请日期 2012.07.03
申请人 DISCO ABRASIVE SYST LTD 发明人 FUKUOKA TAKEOMI;KADOSAWA EIJI
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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