| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance device capable of correcting position deviation including inclination of a hand.SOLUTION: A controller 50 recognizes differences in an X direction, a Y direction, and inclination &thetas; between a current position P' of a hand 10 and a teaching position P. When the difference of inclination &thetas; is not within a reference range, the controller 50 adjusts the amount of extension or revolution of an arm 20 so that the difference of inclination &thetas; becomes zero. When the difference of Y direction is not within a reference range, the controller 50 adjusts the amount of extension or revolution of the arm 20 so that the difference of the Y direction and the inclination &thetas; become zero. When the difference of the X direction is not within the reference range, the controller 50 adjusts the amount of extension or revolution of the arm 20 so that the difference of the X direction becomes zero. |
