| 摘要 |
PROBLEM TO BE SOLVED: To effectively and efficiently reduce the content of impurities in helium gas by low-cost and small-sized facilities without requiring great purification energy.SOLUTION: Helium gas contains at least hydrogen, carbon monoxide, nitrogen and oxygen as impurities. The original oxygen content is more than the stoichiometric amount necessary to react with the total of the original hydrogen content and the original carbon monoxide content. The originally contained hydrogen and the originally contained carbon monoxide are reacted with the originally contained oxygen over a catalyst. Hydrogen less than the stoichiometric amount necessary to react with all the residual oxygen thereby in the helium gas is added. Then, the residual oxygen in helium gas is reacted with the added hydrogen over a catalyst. Next, water content in the helium gas is reduced by a desiccation operation. Thereafter, at least carbon dioxide, nitrogen and oxygen remaining in the helium gas are adsorbed on an adsorbent in the pressure swing adsorption method. |
