COATING APPLICATOR AND NOZZLE

摘要

PROBLEM TO BE SOLVED: To improve uniformity in film thickness.SOLUTION: A coating applicator according to an embodiment includes a nozzle and a movement mechanism. The nozzle includes: a storage chamber in which a coating liquid is stored; and a slit-like flow passage communicating with the storage chamber. The coating liquid is discharged from a discharge opening formed at the front end of the flow passage. The movement mechanism allows the nozzle and a substrate to move relatively along the surface of the substrate. In addition, the nozzle includes partition plates which partition off the inside of the storage chamber into a plurality of small compartments in the longitudinal direction of the flow passage.