RESIST RELEASE AGENT AND RELEASING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a resist release agent showing excellent resist detachability and also suppressing corrosion of copper.SOLUTION: The resist release agent comprising N-(2, 3-dihydroxypropyl)piperazine expresses excellent resist detachability, and can suppress corrosion of copper. Preferably the weight of the N-(2,3-dihydroxypropyl)piperazine is 0.5 to 50 wt.%.