DEVICE MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To move a wafer holder from a processing position of the wafer holder, in which the water holder is currently placed, to another processing position even when a robot does not bring up the wafer holder.SOLUTION: A manufacturing apparatus manufacturing a device includes: a first placement area where a wafer holder transferred by the device manufacturing apparatus is placed; and a transfer path on which the wafer holder rolls thereby being transferred from the first placement area to a second placement area which is different from the first placement area.