| 摘要 |
PURPOSE:To obtain the titled device which is inexpensive and has a high reliability, by forming a color separation filter with purely inorganic materials given differences in film thickness of light absorbing films, so that a package sealing temperature is set to a high temperature. CONSTITUTION:Before forming a passivation film 4 on a photodetecting surface, a polysilicon film is formed by an LPCVD, and thereafter, a photoresist is applied onto the whole surface, and by a photolithography method, the photoresist is eliminated except on a photoelectric transducer 9a, and the polysilicon film is brought to etching. Subsequently, when the remaining photoresist is eliminated, a light absorbing film 11a is formed on the upper face of the photoelectric transducer 9a. Thereafter, the same process is repeated, and a light absorbing film 11b and 11c are formed successively. In that case, when thickness of the light absorbing films 11a, 11b and 11c is set to 10,000Angstrom , 5,000Angstrom and 0Angstrom , respectively, by providing a step difference on the thickness of the polysilicon film, a red transmission filter, a blue cutting-off filter, and an all color transmission filter are obtained, respectively.
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