| 摘要 |
PROBLEM TO BE SOLVED: To perform management of backup data about the operation parameters, e.g., acquisition of backup data and restore of backup data stored, safely on a group management device.SOLUTION: A substrate processing system 1 includes receiving means for receiving the device information from a substrate processing device 10, and a group management device 12 including storage means for storing the device information and the backup data thereof. Upon receiving a backup request, the group management device 12 checks whether the backup data of a backup object does not exceed an upper limit and can be backed up. Backup is performed if it can be backed up, otherwise the data of a backup object is split, and backup is carried out by repeating transmission and reception within a range not exceeding the upper limit. |
