MANUFACTURING METHOD OF PATTERN STRUCTURE BODY, AND PATTERN FORMATION SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pattern structure body having fine patterns with high accuracy and also to provide a pattern formation substrate usable for the manufacturing method.SOLUTION: A manufacturing method includes the steps of: forming a hard mask material layer in a pattern formation area demarcated on a desired surface of a substrate for imprint mold, and an etching stabilization layer in a non-pattern formation area; forming a resist pattern on the hard mask material layer; etching the hard mask material layer through the resist pattern to form a hard mask; and etching the substrate through the formed hard mask to form an uneven structure in the pattern formation area.