发明名称 PRESSURE DETECTOR AND PRESSURE DETECTION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a pressure detector capable of inexpensively and excellently detecting accurate pressure, and also to provide a sensor to be used for the pressure detector.SOLUTION: A pressure detector includes: a first capacitor 11 having electrodes to be moved in response to pressure; a second capacitor 12 having fixed electrodes; first and second oscillation circuits 31 and 32; a difference frequency detection unit; and a conversion unit. The two capacitors are formed by forming cavities in a laminate of multiple substrates where multiple pieces of conductive foil are arranged, for example.
申请公布号 JP2014009950(A) 申请公布日期 2014.01.20
申请号 JP20120144334 申请日期 2012.06.27
申请人 KYUSHU INSTITUTE OF TECHNOLOGY 发明人 SATO YASUSHI
分类号 G01L9/12 主分类号 G01L9/12
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