| 摘要 |
PROBLEM TO BE SOLVED: To make compact an electrical feedthrough used in a vacuum device while reducing the cost.SOLUTION: An electrical feedthrough 33 transfers an electric signal while vacuum sealing between the vacuum side and the atmosphere side of a vacuum device. The electrical feedthrough 33 includes pads 334e, 334f, a printed circuit board 336 having a through via 330 formed to penetrate the pads 334e, 334f, and a connector 200 having a connection pin 201a, being soldered to the pads 334e, 334f so as to surface mount the connector 200 on the printed circuit board 336. The through via 330 is sealed when the connection pin 201a is soldered thereto. Consequently, a general purpose connector 200 can be used, and since the through via 330 is formed in the pad region, the cost and size can be reduced. |
