METHOD FOR MANUFACTURING SEMICONDUCTOR FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor film capable of manufacturing a ZnMgO film in which an additive amount of Mg to Zn is more than 20 mol% using a liquid phase film formation method.SOLUTION: A method for manufacturing a semiconductor film comprises: a first step of preparing a mixture containing zinc hydroxide and magnesium hydroxide; a second step of attaching the mixture to a film-formed member; and a third step of heating the film-formed member attached with the mixture from 300°C to 400°C in 100/30 minutes.