| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holder capable of moving from a current position to another position even if an operator does not bring up the wafer holder.SOLUTION: A wafer holder 1 housing a wafer 101 includes at least one wheel part which rolls on a placement surface, on which the wafer holder 1 is placed, and rolls on the placement surface by rotations of the wheel part. The wafer holder 1 includes: support parts 104 for holding the housed wafer 101; and a foundation part 102 which is connected with the support parts 104 and is used for placing the wafer holder 1 on the placement surface. The wheel part is placed on the foundation part 102. |
