发明名称 OPTICAL IN-LIQUID PARTICLE DETECTION DEVICE AND IN-LIQUID PARTICLE DETECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an optical in-liquid particle detection device capable of facilitating countermeasures to the refractive index variation of liquid.SOLUTION: The optical in-liquid particle detection device includes: a light source 1 which emits inspection light; conversion means 21 which converts the inspection light into parallel light; a light source side translucent member 10 through which the inspection light converted into the parallel light is transmitted; a condensing reflection mirror 31 which reflects the inspection light transmitted through the light source side translucent member 10 to a focal point; a casing 2 constituted such that a region surrounded by the light source side translucent member 10 and the condensing reflection mirror 31, and including the focal point of the condensing reflection mirror 31 is filled with liquid; an injection mechanism 3 which injects fluid containing particles to the focal point of the condensing reflection mirror 31; and a light detection section 4 which detects scattering light or fluorescent light generated when the particles included in the fluid are irradiated with the inspection light.
申请公布号 JP2014010072(A) 申请公布日期 2014.01.20
申请号 JP20120147322 申请日期 2012.06.29
申请人 AZBIL CORP 发明人 KINUGASA SEIICHIRO
分类号 G01N15/14;G01N15/02;G01N21/49;G01N21/64 主分类号 G01N15/14
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